Extended Data Fig. 8: The electrical properties of MoS₂ transistors distributed in 10 tiers.

a, Schematic diagram of 10-tiers M3D system. b, c, Transfer curves of monolayer MoS₂ transistors within each tier (from tier #1 to tier #10). 10 transistors are measured in each tier, and the bias voltage is fixed at 1 V. d, e, Summary of the mobility (d) and on-state current (e) of each tier MoS₂ transistors. The devices (distributed within 10 different tiers) exhibit consistent electron mobility and on-state current, indicating the vdW integration of upper tiers won’t impact the device performance of lower tiers. The error bars are determined from the statistical standard deviations of 10 devices for each tier.